Execute and improve preventive maintenance, chamber cleans, wet cleans kit changes, leak checks, and recovery sequences so tools return to process-worthy condition with documented particle, vacuum, and electrical results; troubleshoot vacuum, RF/plasma, gas and chemical delivery, pneumatics, interlocks, thermal systems, and wafer-handling robots to the component level. Work from Tool Hookup Design Packages (THDPs) as the field source of truth (utility matrices, stick diagrams, P&IDs, POU/VMB laterals, electrical one-lines, seismic/pad, exhaust/abatement, and isometrics); walk packages against as-built conditions, redline discrepancies, and close punchlist items with design engineering before OEM startup.