Support cost control for semiconductor facility systems that may include ultra pure water, process cooling water, chilled water, condenser water, heating water, compressed dry air, process vacuum, bulk gas, specialty gas, chemical distribution, process drains, wastewater neutralization, and utility equipment connections. Develop and validate quantity based cost tracking for pipe by size, material, and specification, as well as fittings, valves, supports, weld inches, specialty components, insulation, heat tracing, testing, flushing, cleaning, and system turnover.