Design, develop, and maintain the mechanical architecture of next-generation multi-DOF ultra-precision motion stages that operate under high vacuum for eBeam inspection and review, taking the work from concept through detailed design, prototyping, and validation to meet nanometer-level accuracy, stability, and noise-control targets, including: Multi-degree-of-freedom stage structures, flexures, and precision motion mechanisms. Perform structural, thermal, and vibration/modal FEA and tolerance stack-up analysis to optimize stiffness, damping, accuracy, and manufacturability, and build, test, and troubleshoot prototypes - including modal testing with accelerometers and impact hammers - to characterize dynamic performance and correlate models against test data.