Design and integrate precision mechanical, opto-mechanical, and optical components, assemblies, and subsystems including frames, structures, panels, stages, sample transfer mechanisms,, gas and liquid delivery subsystems, environmental and temperature controls, motion control, mounts, optical lenses, illumination sources, beam delivery systems, interferometers, polarization optics, optical coatings, filters, mirrors, prisms, and opto-mechanical assemblies. Lead and support system integration and tool bring-up as necessary, ensuring seamless interaction between semiconductor platform components and subsystems, mechanical, gas-delivery, and electrical assemblies, optics, sensors, motion systems, electronics, and control software.